Piezo Actuators & Stages

DSM’s flexure-guided linear piezoelectric actuators and stages are excellent choices for precision motion control and positioning applications. Solid-state flexures provide smooth, stiction/backlash-free motion for positioning applications.

XSA-0200C-S-0718-150-SS

Travel Range: 200 µm. Stiffness: 0.8 N/µm. Blocking Force: 160 N.
DSM’s nanopositioning piezoelectric XSA-0200C stage features flexure-guided motion over a 200 micron travel range for scanning, metrology, and inspection processes. The stage’s stable and stiff kinematic design promotes parallelism in the output motion with minimal pitch and yaw as well as dynamic responsiveness for excellent position stability and control.
View This Product

ZSA-1000C

Travel Range: 1000 µm. Stiffness: 0.38 N/µm. Blocking Force: 150 N.
DSM’s nanopositioning piezoelectric ZSA-1000C stage features flexure-guided motion over a 1000 micron travel range for scanning, metrology, and inspection processes. The stage’s stable and stiff kinematic design promotes parallelism in the output motion with minimal pitch and yaw as well as dynamic responsiveness for excellent position stability and control.
View This Product

NA-025-0518-150-SS

Travel Range: 25 µm. Stiffness: 60 N/µm. Blocking Force: 1500 N.
DSM's NA series actuators are direct-drive piezoelectric actuators integrated into a protective metallic frame. The frame is typically a monolithic piece of stainless steel or titanium alloy with a flexure-based expansion component. The flexure minimizes the resistance that the frame might impart to the piezoelectric actuation.
View This Product

NA-080-0554-150-SS

Travel Range: 80 µm. Stiffness: 18 N/µm. Blocking Force: 1440 N.
DSM's NA series actuators are direct-drive piezoelectric actuators integrated into a protective metallic frame. The frame is typically a monolithic piece of stainless steel or titanium alloy with a flexure-based expansion component. The flexure minimizes the resistance that the frame might impart to the piezoelectric actuation.
View This Product

FPA-0080E-S-0509

Travel range: 80 µm. Stiffness: 0.7 N/µm. Blocking Force: 56N.
DSM's FPA-0080E is a flexure guided piezoelectric actuator useful for both dynamic and static applications. Custom mounting conditions can be integrated into the design. "E" version actuators expand when they are energized.
View This Product

FPA-0085E-S-0518

Travel Range: 85 µm. Stiffness: 2.3 N/µm. Blocking Force 195 N.
DSM's FPA is a flexure guided piezoelectric actuator useful for both dynamic and static applications. Custom mounting conditions can be integrated into the design. "E" version actuators expand when they are energized.
View This Product

FPA-0100E-S-0518

Travel Range: 100 µm. Stiffness: 1.6 N/µm. Blocking Force 160 N.
DSM’s FPA is a flexure guided piezoelectric actuator useful for both dynamic and static applications. Custom mounting conditions can be integrated into the design. “E” version actuators expand when they are energized.
View This Product

FPA-0150E-S-0518

Travel Range: 150 µm. Stiffness: 0.71 N/µm. Blocking Force: 107 N.
DSM’s FPA is a flexure guided piezoelectric actuator useful for both dynamic and static applications. Custom mounting conditions can be integrated into the design. “E” version actuators expand when they are energized.
View This Product

FPA-0200E-S-1018

Travel Range: 200 µm. Stiffness: 2 N/µm. Blocking Force: 400 N.
DSM’s FPA is a flexure guided piezoelectric actuator useful for both dynamic and static applications. Custom mounting conditions can be integrated into the design. “E” version actuators expand when they are energized.
View This Product

FPA-0200C-S-1018

Travel Range: 200 µm. Stiffness: 1.7 N/µm. Blocking Force: 340 N.
DSM’s FPA is a flexure guided piezoelectric actuator useful for both dynamic and static applications. Custom mounting conditions can be integrated into the design. “C” version actuators contract when they are energized.
View This Product

FPA-0200E-S-0536

Travel Range: 200 µm. Stiffness: 0.9 N/µm. Blocking Force: 180 N.
DSM’s FPA is a flexure guided piezoelectric actuator useful for both dynamic and static applications. Custom mounting conditions can be integrated into the design. “E” version actuators expand when they are energized.
View This Product

FPA-0200E-S-0518

Travel Range: 200 µm. Stiffness: 0.48 N/µm. Blocking Force: 96 N.
DSM’s FPA is a flexure guided piezoelectric actuator useful for both dynamic and static applications. Custom mounting conditions can be integrated into the design. “E” version actuators expand when they are energized.
View This Product

FPA-0300E-S-0536

Travel Range: 300 µm. Stiffness: 0.49 N/µm. Blocking Force: 147 N.
DSM’s FPA is a flexure guided piezoelectric actuator useful for both dynamic and static applications. Custom mounting conditions can be integrated into the design. “E” version actuators expand when they are energized.
View This Product

FPA-0400E-S-0536

Travel Range: 400 µm. Stiffness: 0.33 N/µm. Blocking Force: 132 N.
DSM’s FPA is a flexure guided piezoelectric actuator useful for both dynamic and static applications. Custom mounting conditions can be integrated into the design. “E” version actuators expand when they are energized.
View This Product

FPA-0550EHK-P-2054

Travel Range: 550 µm. Stiffness: 2.5 N/µm. Blocking Force: 1375 N.
DSM’s FPA is a flexure guided piezoelectric actuator useful for both dynamic and static applications. Custom mounting conditions can be integrated into the design. “E” version actuators expand when they are energized.
View This Product

FPA-0500C-P-1054

Travel Range: 500 µm. Stiffness: 1.35 N/µm. Blocking Force: 675 N.
DSM’s FPA is a flexure guided piezoelectric actuator useful for both dynamic and static applications. Custom mounting conditions can be integrated into the design. “C” version actuators contract when they are energized.
View This Product

FPA-0500E-P-1036

Travel Range: 500 µm. Stiffness: 0.72 N/µm. Blocking Force: 360 N.
DSM’s FPA is a flexure guided piezoelectric actuator useful for both dynamic and static applications. Custom mounting conditions can be integrated into the design. “E” version actuators expand when they are energized.
View This Product

FPA-0500E-P-0536

Travel Range: 500 µm. Stiffness: 0.22 N/µm. Blocking Force: 110 N.
DSM’s FPA is a flexure guided piezoelectric actuator useful for both dynamic and static applications. Custom mounting conditions can be integrated into the design. “E” version actuators expand when they are energized.
View This Product

FPA-0500E-S-0518

Travel Range: 500 µm. Stiffness: 0.08 N/µm. Blocking Force: 40 N.
DSM’s FPA is a flexure guided piezoelectric actuator useful for both dynamic and static applications. Custom mounting conditions can be integrated into the design. “E” version actuators expand when they are energized.
View This Product

FPA-0750E-P-1054

Travel Range: 750 µm. Stiffness: 0.53 N/µm. Blocking Force: 398 N.
DSM’s FPA is a flexure guided piezoelectric actuator useful for both dynamic and static applications. Custom mounting conditions can be integrated into the design. “E” version actuators expand when they are energized.
View This Product

FPA-1000E-P-1054

Travel Range: 1000 µm. Stiffness: 0.29 N/µm. Blocking Force: 290 N.
DSM’s FPA is a flexure guided piezoelectric actuator useful for both dynamic and static applications. Custom mounting conditions can be integrated into the design. “E” version actuators expand when they are energized.
View This Product

FPA-1000E-P-1072

Travel Range: 1000 µm. Stiffness: 0.42 N/µm. Blocking Force: 420 N.
DSM’s FPA is a flexure guided piezoelectric actuator useful for both dynamic and static applications. Custom mounting conditions can be integrated into the design. “E” version actuators expand when they are energized.
View This Product

FPA-1500E-P-1072

Travel Range: 1500 µm. Stiffness: 0.19 N/µm. Blocking Force: 285 N.
DSM’s FPA is a flexure guided piezoelectric actuator useful for both dynamic and static applications. Custom mounting conditions can be integrated into the design. “E” version actuators expand when they are energized.
View This Product

FPA-2000E-P-1072

Travel Range: 2000 µm. Stiffness: 0.15 N/µm. Blocking Force: 300 N.
DSM’s FPA is a flexure guided piezoelectric actuator useful for both dynamic and static applications. Custom mounting conditions can be integrated into the design. “E” version actuators expand when they are energized.
View This Product

PSA-0350

Travel Range: 350 µm. Stiffness: 0.24 N/µm. Blocking Force Pull/Push Directions: 84/12 N.
High frequency piezo actuator with linear contracting motion with unipolar displacement of 350 µm and bipolar displacement up to 400µm. Minimal moving mass results in exceptionally high resonant frequency. Customizable and scalable for new applications.
View This Product

PSA-0500

Travel Range: 500 µm. Stiffness: 0.03 N/µm. Blocking Force Pull/Push Directions: 15/3 N.
High frequency piezo actuator with linear contracting motion with displacement to 500 µm. Minimal moving mass results in exceptionally high resonant frequency. Optimal actuator for force generation in adaptive systems technology, nanoimprint processes, or machine tools. Customizable and scalable for new applications.
View This Product

PSA-1250

Travel Range: 1250 µm. Stiffness: 0.045 N/µm. Blocking Force Pull/Push Directions: 56/67 N.
High frequency piezo actuator with linear contracting motion with displacement to 1500 µm. Minimal moving mass results in exceptionally high resonant frequency. Optimal actuator for force generation in adaptive systems technology, nanoimprint processes, or machine tools. Customizable and scalable for new applications.
View This Product

LPA-0100E-P-0518

Travel Range: 100 µm. Stiffness: 1.6 N/µm. Blocking Force: 160 N.
LPA actuators are designed for applications that require a large travel range. The actuators were designed to oscillate specimens in a high magnetic field and are constructed of titanium and other non-ferromagnetic materials. Custom mounting conditions can be integrated into the design.
View This Product

LFPA-6000

Travel Range: 6000 µm. Stiffness: 0.006 N/µm. Blocking Force: 36 N.
DSM's LFPA actuators are designed for applications that require a large travel range. The actuators were designed to oscillate specimens in a high magnetic field and are constructed of titanium and other non-ferromagnetic materials. The two-stage amplification enables the design to achieve a travel range of 6 mm at the mechanism's output.
View This Product

LFPA-10000

Travel Range: 10000 µm. Stiffness: 0.002 N/µm. Blocking Force: 20 N.
LFPA actuators are designed for applications that require a large travel range. The actuators were designed to oscillate specimens in a high magnetic field and are constructed of titanium and other non-ferromagnetic materials. The two-stage amplification enables the design to achieve a travel range of 10 mm at the mechanism's output.
View This Product