Piezo Actuators & Stages

DSM’s flexure-guided linear piezoelectric actuators and stages are excellent choices for precision motion control and positioning applications. Solid-state flexures provide smooth, stiction/backlash-free motion for positioning applications.
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XSA-0200C-S-0718-150-SS

Nominal Travel: 200 µm. Stiffness: 0.8 N/µm. Blocking Force: 160 N.
DSM’s nanopositioning piezoelectric XSA-0200C stage features flexure-guided motion over a 200 micron travel range for scanning, metrology, and inspection processes. The stage’s stable and stiff kinematic design promotes parallelism in the output motion with minimal pitch and yaw as well as dynamic responsiveness for excellent position stability and control.
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ZSA-1000C

Travel Range: 1000 µm. Stiffness: 0.4 N/µm. Blocking Force: 150 N.
DSM’s nanopositioning piezoelectric ZSA-1000C stage features flexure-guided motion over a 1000 micron travel range for scanning, metrology, and inspection processes. The stage’s stable and stiff kinematic design promotes parallelism in the output motion with minimal pitch and yaw as well as dynamic responsiveness for excellent position stability and control.
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NA-025-0518-150-SS

Nominal Travel: 25 µm. Stiffness: 60 N/µm. Blocking Force: 1200 N.
DSM's NA series actuators are direct-drive piezoelectric actuators integrated into a protective metallic frame. The frame is typically a monolithic piece of stainless steel or titanium alloy with a flexure-based expansion component. The flexure minimizes the resistance that the frame might impart to the piezoelectric actuation.
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NA-080-0554-150-SS

Nominal Travel: 80 µm. Stiffness: 18 N/µm. Blocking Force: 1152 N.
DSM's NA series actuators are direct-drive piezoelectric actuators integrated into a protective metallic frame. The frame is typically a monolithic piece of stainless steel or titanium alloy with a flexure-based expansion component. The flexure minimizes the resistance that the frame might impart to the piezoelectric actuation.
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FPA-0085E-S-0518

Nominal travel: 85 µm. Stiffness: 2.5 N/µm. Blocking Force 170 N.
DSM's FPA is a flexure guided piezoelectric actuator useful for both dynamic and static applications. Custom mounting conditions can be integrated into the design. "E" version actuators expand when they are energized.
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FPA-0100E-S-0518

Nominal Travel: 105 µm. Stiffness: 1.85 N/µm. Blocking Force 155 N.
DSM’s FPA is a flexure guided piezoelectric actuator useful for both dynamic and static applications. Custom mounting conditions can be integrated into the design. “E” version actuators expand when they are energized.
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FPA-0150E-S-0518

Nominal Travel: 165 µm. Stiffness: 0.8 N/µm. Blocking Force: 106 N.
DSM’s FPA is a flexure guided piezoelectric actuator useful for both dynamic and static applications. Custom mounting conditions can be integrated into the design. “E” version actuators expand when they are energized. ** SPECIAL PRICING ON THIS MODEL - DSM is pleased to now be able to offer single units for sale at the Qty50-99 price on select models. **
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FPA-0200E-S-1018

Nominal Travel: 205 µm. Stiffness: 2.15 N/µm. Blocking Force: 353 N.
DSM’s FPA is a flexure guided piezoelectric actuator useful for both dynamic and static applications. Custom mounting conditions can be integrated into the design. “E” version actuators expand when they are energized.
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FPA-0200C-S-1018

Nominal Travel: 210 µm. Stiffness: 1.9 N/µm. Blocking Force: 304 N.
DSM’s FPA is a flexure guided piezoelectric actuator useful for both dynamic and static applications. Custom mounting conditions can be integrated into the design. “C” version actuators contract when they are energized.
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FPA-0200E-S-0536

Nominal Travel: 210 µm. Stiffness: 1 N/µm. Blocking Force: 168 N.
DSM’s FPA is a flexure guided piezoelectric actuator useful for both dynamic and static applications. Custom mounting conditions can be integrated into the design. “E” version actuators expand when they are energized.
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FPA-0200E-S-0518

Nominal Travel: 210 µm. Stiffness: 0.65 N/µm. Blocking Force: 109 N.
DSM’s FPA is a flexure guided piezoelectric actuator useful for both dynamic and static applications. Custom mounting conditions can be integrated into the design. “E” version actuators expand when they are energized.
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FPA-0300E-S-0536

Nominal Travel: 300 µm. Stiffness: 0.58 N/µm. Blocking Force: 139 N.
DSM’s FPA is a flexure guided piezoelectric actuator useful for both dynamic and static applications. Custom mounting conditions can be integrated into the design. “E” version actuators expand when they are energized.
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FPA-0400E-S-0536

Nominal Travel: 440 µm. Stiffness: 0.35 N/µm. Blocking Force: 123 N.
DSM’s FPA is a flexure guided piezoelectric actuator useful for both dynamic and static applications. Custom mounting conditions can be integrated into the design. “E” version actuators expand when they are energized.
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FPA-0550EHK-P-2054

Nominal Travel: 560 µm. Stiffness: 2.6 N/µm. Blocking Force: 1165 N.
DSM’s FPA is a flexure guided piezoelectric actuator useful for both dynamic and static applications. Custom mounting conditions can be integrated into the design. “E” version actuators expand when they are energized.
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FPA-0500C-P-1054

Nominal Travel: 550 µm. Stiffness: 1.7 N/µm. Blocking Force: 680 N.
DSM’s FPA is a flexure guided piezoelectric actuator useful for both dynamic and static applications. Custom mounting conditions can be integrated into the design. “C” version actuators contract when they are energized.
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FPA-0500E-P-1036

Nominal Travel: 540 µm. Stiffness: 0.87 N/µm. Blocking Force: 376 N.
DSM’s FPA is a flexure guided piezoelectric actuator useful for both dynamic and static applications. Custom mounting conditions can be integrated into the design. “E” version actuators expand when they are energized.
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FPA-0500E-P-0536

Nominal Travel: 525 µm. Stiffness: 0.24 N/µm. Blocking Force: 101 N.
DSM’s FPA is a flexure guided piezoelectric actuator useful for both dynamic and static applications. Custom mounting conditions can be integrated into the design. “E” version actuators expand when they are energized. ** SPECIAL PRICING ON THIS MODEL - DSM is pleased to now be able to offer single units for sale at the Qty50-99 price on select models. **
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FPA-0500E-S-0518

Nominal Travel: 500 µm. Stiffness: 0.08 N/µm. Blocking Force: 32 N.
DSM’s FPA is a flexure guided piezoelectric actuator useful for both dynamic and static applications. Custom mounting conditions can be integrated into the design. “E” version actuators expand when they are energized.
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FPA-0750E-P-1054

Nominal Travel: 750 µm. Stiffness: 0.68 N/µm. Blocking Force: 408 N.
DSM’s FPA is a flexure guided piezoelectric actuator useful for both dynamic and static applications. Custom mounting conditions can be integrated into the design. “E” version actuators expand when they are energized.
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FPA-1000E-P-1054

Nominal Travel: 1080 µm. Stiffness: 0.4 N/µm. Blocking Force: 346 N.
DSM’s FPA is a flexure guided piezoelectric actuator useful for both dynamic and static applications. Custom mounting conditions can be integrated into the design. “E” version actuators expand when they are energized. ** SPECIAL PRICING ON THIS MODEL - DSM is pleased to now be able to offer single units for sale at the Qty50-99 price on select models. **
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FPA-1000E-P-1072

Nominal Travel: 1070 µm. Stiffness: 0.48 N/µm. Blocking Force: 411 N.
DSM’s FPA is a flexure guided piezoelectric actuator useful for both dynamic and static applications. Custom mounting conditions can be integrated into the design. “E” version actuators expand when they are energized.
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FPA-1500E-P-1072

Nominal Travel: 1600 µm. Stiffness: 0.25 N/µm. Blocking Force: 320 N.
DSM’s FPA is a flexure guided piezoelectric actuator useful for both dynamic and static applications. Custom mounting conditions can be integrated into the design. “E” version actuators expand when they are energized.
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FPA-2000E-P-1072

Nominal Travel: 2100 µm. Stiffness: 0.15 N/µm. Blocking Force: 252 N.
DSM’s FPA is a flexure guided piezoelectric actuator useful for both dynamic and static applications. Custom mounting conditions can be integrated into the design. “E” version actuators expand when they are energized. ** SPECIAL PRICING ON THIS MODEL - DSM is pleased to now be able to offer single units for sale at the Qty50-99 price on select models. **
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PSA-0350

Travel Range: 350 µm. Stiffness: 0.24 N/µm. Blocking Force Pull/Push Directions: 84/12 N.
High frequency piezo actuator with linear contracting motion with unipolar displacement of 350 µm and bipolar displacement up to 400µm. Minimal moving mass results in exceptionally high resonant frequency. Customizable and scalable for new applications.
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PSA-0500

Travel Range: 500 µm. Stiffness: 0.03 N/µm. Blocking Force Pull/Push Directions: 15/3 N.
High frequency piezo actuator with linear contracting motion with displacement to 500 µm. Minimal moving mass results in exceptionally high resonant frequency. Optimal actuator for force generation in adaptive systems technology, nanoimprint processes, or machine tools. Customizable and scalable for new applications.
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PSA-1250

Travel Range: 1250 µm. Stiffness: 0.045 N/µm. Blocking Force Pull/Push Directions: 56/67 N.
High frequency piezo actuator with linear contracting motion with displacement to 1500 µm. Minimal moving mass results in exceptionally high resonant frequency. Optimal actuator for force generation in adaptive systems technology, nanoimprint processes, or machine tools. Customizable and scalable for new applications.
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LPA-0100E-P-0518

Nominal Travel: 100 µm. Stiffness: 1.75 N/µm. Blocking Force: 140 N.
LPA actuators are designed for applications that require a large travel range. The actuators were designed to oscillate specimens in a high magnetic field and are constructed of titanium and other non-ferromagnetic materials. Custom mounting conditions can be integrated into the design.
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LFPA-6000

Nominal Travel: 6000 µm. Stiffness: 0.006 N/µm. Blocking Force: 29 N.
DSM's LFPA actuators are designed for applications that require a large travel range. The actuators were designed to oscillate specimens in a high magnetic field and are constructed of titanium and other non-ferromagnetic materials. The two-stage amplification enables the design to achieve a travel range of 6 mm at the mechanism's output.
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LFPA-10000

Nominal Travel: 10000 µm. Stiffness: 0.002 N/µm. Blocking Force: 16 N.
LFPA actuators are designed for applications that require a large travel range. The actuators were designed to oscillate specimens in a high magnetic field and are constructed of titanium and other non-ferromagnetic materials. The two-stage amplification enables the design to achieve a travel range of 10 mm at the mechanism's output.
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