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XSA-0200C-S-0718-150-SS

Data Sheet

<table><tbody><tr><th>Quantity</th><th>Unit Price</th></tr><tr><td>1</td><td>$2242</td></tr><tr><td>2</td><td>$2130</td></tr><tr><td>5</td><td>$1906</td></tr><tr><td>10</td><td>$1794</td></tr><tr><td>25</td><td>$1569</td></tr><tr><td>50</td><td>$1345</td></tr><tr><td>100</td><td>$1121</td></tr></tbody></table>

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<table><tbody><tr><th>Quantity</th><th>Unit Price</th></tr><tr><td>1</td><td>$2242</td></tr><tr><td>2</td><td>$2130</td></tr><tr><td>5</td><td>$1906</td></tr><tr><td>10</td><td>$1794</td></tr><tr><td>25</td><td>$1569</td></tr><tr><td>50</td><td>$1345</td></tr><tr><td>100</td><td>$1121</td></tr></tbody></table>

Description

DSM’s nanopositioning piezoelectric XSA-0200C stage features flexure-guided motion over a 200 micron travel range for scanning, metrology, and inspection processes. The stage’s stable and stiff kinematic design promotes parallelism in the output motion with minimal pitch and yaw as well as dynamic responsiveness for excellent position stability and control.

Specifications

<table ><tbody><tr><td>Nominal Travel, 0V to 150V</td><td>170 µm</td></tr><tr><td>Nominal Travel, -30V to 150V</td><td>200 µm</td></tr><tr><td>Stiffness</td><td>0.8 N/µm</td></tr><tr><td>Motion Direction</td><td>Contracting (towards piezo stack)</td></tr><tr><td>Load Capacity</td><td>50 N Max</td></tr><tr><td>Lateral Load Capacity</td><td>20 N Max</td></tr><tr><td>Linearity</td><td>0.12% typical</td></tr><tr><td>Pitch / Yaw</td><td><20 µrad typical</td></tr><tr><td>Unloaded Resonant Frequency</td><td>420 Hz</td></tr><tr><td>Blocking Force</td><td>136 N</td></tr><tr><td>Push/Pull Force Capacity</td><td>40 N Max.</td></tr><tr><td>Electrical Capacitance</td><td>3.6 µF</td></tr><tr><td>Operating Temperature Range</td><td>-20 to 80 °C</td></tr><tr><td>Operating Voltage</td><td>-30 to 150 V</td></tr><tr><td>Dimensions</td><td>60 x 60 12.5 mm</td></tr><tr><td>Mass*</td><td>0.31 kg</td></tr><tr><td>Material</td><td>Stainless Steel</td></tr><tr><td>Cable Length</td><td>1m (custom lengths available</td></tr><tr><td>Mounting Interface</td><td>4x M4 or #8 SHCS</td></tr><tr><td>Output Interface</td><td>4x M3x0.5</td></tr></tbody></table>

 

* Mass stated for reference

Highlights of the X-Stage Design

  • Flexure guidance provides smooth, parallel motion with no backlash
  • Stiff construction for responsive dynamic behavior
  • Customizable mounting configurations

Application Fields

  • Precision manufacturing
  • Microscopy
  • Laser systems
  • Material science
  • Optics/photonics
  • Electronics manufacturing
  • Science & research institutions
  • Test & inspection systems

Options

  • Integrated position sensor
  • Vacuum compatibility
  • Custom mounting holes
  • Custom wire lengths and connectors
  • Non-magnetic compatibility

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