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I-20 Piezo Linear Motor

Data Sheet

<table><tbody><tr><th>Quantity</th><th>Unit Price</th></tr><tr><td>1</td><td>$6500</td></tr></tbody></table>

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<table><tbody><tr><th>Quantity</th><th>Unit Price</th></tr><tr><td>1</td><td>$6500</td></tr></tbody></table>


High performance piezo linear translation stage with integrated non-magnetic cross-roller bearings. Body and structural elements are titanium. Piezoelectric elements use non-magnetic materials. Standard unit has 300 series stainless steel screws/hardware and the option for all non-ferrous screws/hardware is available. Highlights: vacuum environment compatible, magnetic environment compatible, and zero power / power off position lock.


<table><tbody><tr><td>Total Stroke</td><td>15 mm (0.6 in)</td></tr><tr><td>Typical Step Size</td><td>5 µm</td></tr><tr><td>Analog Move</td><td>20 nm</td></tr><tr><td>Axial Drive Stiffness</td><td>>5 N/µm</td></tr><tr><td>Out of Plane Angular Motion</td><td><100 µrad</td></tr><tr><td>Motor Speed</td><td>Up to 1 mm/sec (with MD-90 Motor Driver)</td></tr><tr><td>Max. Drive Force / Power off Hold</td><td>10 N / 15 N</td></tr><tr><td>Dimensions</td><td>28 mm x 14 mm x 25 mm<br>(1.1 in x 0.55 in x 0.98 in)</td></tr><tr><td>Material</td><td>Titanium, ceramic, PZT, copper</td></tr><tr><td>Mass</td><td>33 g</td></tr><tr><td>Operating Voltage</td><td>-30 V to +150 V</td></tr><tr><td>Controller</td><td>DSM MD-90</td></tr></tbody></table>

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