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I-20 Piezo Linear Motor, Closed Loop (X, XY, XZ, XYZ)

Data Sheet

<table><tbody><tr><th>Quantity</th><th>Unit Price</th></tr><tr><td>1</td><td>$6500</td></tr></tbody></table>

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<table><tbody><tr><th>Quantity</th><th>Unit Price</th></tr><tr><td>1</td><td>$6500</td></tr></tbody></table>

Description

DSM’s I-20 linear piezo stage combines a high-precision step and repeat piezo motor, non-magnetic crossed roller bearings, and a high-resolution linear encoder. The I-20 can be used as a precision linear stage or as a linear actuator to move other devices. Multiple I-20’s can be used create XY and XYZ stages. The internal step and repeat piezo motor offers smooth output motion and can push a load of up to 10 N. When idle, it can resist in-line loads of up to 15 N. The integrated low-friction crossed roller bearings allow the stage to carry very high off-axis loads, eliminating the need to design separate load-bearing elements. DSM’s MD-90 controller enhances the I-20 by adding closed loop positioning control, microstepping, and analog output modes. In the microstepping mode, the driver can vary the step size from the standard ~5 µm down to ~50 nm. In analog mode, the output stage varies using only the linear extension piezo to create smooth motion accurate to 20 nm.

Specifications

<table><tbody><tr><td>Total Stroke</td><td>15 mm (0.6 in)</td></tr><tr><td>Maximum Step Size</td><td>5 µm</td></tr><tr><td>Analog Stroke Range</td><td>20 nm – 5 µm</td></tr><tr><td>Encoder resolution</td><td>10 nm</td></tr><tr><td>Axial Drive Stiffness</td><td>>5 N/µm</td></tr><tr><td>Out of Plane Angular Motion</td><td><100 µrad</td></tr><tr><td>Motor Max Speed</td><td>1 mm/sec (with MD-90 Motor Driver)</td></tr><tr><td>Max. Drive Force / Power off Hold</td><td>10 N / 15 N</td></tr><tr><td>Dimensions</td><td>25 mm x 33.9 mm x 16.1 mm<br>(0.99 in x 1.33 in x 0.64 in)</td></tr><tr><td>Material</td><td>Titanium, ceramic, PZT, copper</td></tr><tr><td>Mass</td><td>45 g (incl. encoder)</td></tr><tr><td>Operating Voltage</td><td>-30 V to +150 V</td></tr><tr><td>Controller</td><td>DSM MD-90</td></tr></tbody></table>

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