Guided Flexure Stages (XSA-ZSA)
DSM’s nanopositioning piezoelectric stages feature flexure-guided motion for scanning, metrology, and inspection processes. The stage’s stable and stiff kinematic design promotes parallelism in the output motion with minimal pitch and yaw as well as dynamic responsiveness for excellent position stability and control.
(Click to view/download Datasheet)
|Total Stroke (µm) -30 to +150V ||Expand or Contract||Stiffness (N/µm)||Blocking Force (N)||Resonant Freq. (Hz)||Solid Model (.stp)