Guided Flexure Stages (XSA-ZSA)

Guided Flexure Stages (XSA-ZSA)

DSM’s nanopositioning piezoelectric XSA-0200C stage features flexure-guided motion over a 200 micron travel range for scanning, metrology, and inspection processes. The stage’s stable and stiff kinematic design promotes parallelism in the output motion with minimal pitch and yaw as well as dynamic responsiveness for excellent position stability and control.

DSM’s nanopositioning piezoelectric ZSA-1000C stage features flexure-guided motion over a 1000 micron travel range for scanning, metrology, and inspection processes. The stage’s stable and stiff kinematic design promotes parallelism in the output motion with extremely low pitch and yaw as well as dynamic responsiveness for excellent position stability and control.

Model Number
(Click to view/download Datasheet)
Total Stroke (µm) -30 to +150V Expand or ContractStiffness (N/µm)Blocking Force (N)Resonant Freq. (Hz)Solid Model (.stp)
ZSA-1000C1000Contract0.38150135---
XSA-200C-S-0718200Expand0.8160420---