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ZSA-1000 Large Stroke Stage
 Description
DSM's solid-state, flexure-based, piezoelectric Z-stage features a large, optional through-hole for optical or tooling access. The stage is driven by an internal piezoelectric multilayer stack actuator, and the stage's stable and stiff design is optimized for +/- 0.5 mm displacement. Kinematic flexures ensure parallelism in the output motion.
Download PDF Brochure for the ZSA-1000 piezo stage
 A second 1 mm range stage was designed for closed loop control in semiconductor industry applications. The resulting CZSA-1000 was implemented with a high-resolution capacitive probe for 20nm position stability. Using the feedback signal from this displacement sensor, DSM's SA-series servo amplifiers (link to piezo_amplifiers.html) provide standalone closed-loop control with serial communication, analog or digital feedback, and digital I/O for additional control and communication capabilities. Consequently, the CZSA nanopositioning system provides very stable velocity profiles for scanning applications.
Download PDF Brochure for the CZSA-1000 nanopositioning piezo stage
Custom Actuators
DSM has extensive experience in actuator design for specialized force or stroke requirements. Customers are encouraged to contact DSM regarding any specific actuator requests.
Highlights of the ZSA-1000 design
- Flexure-based for smooth, parallel motion
- 25 mm stage height
- Large 28 mm diameter through-hole for optical or tooling access
- Stiff construction for precise servo positioning
- Displacement ranges up to +/- 1 mm
- Low rotation output stage
| Stroke: |
+/- 0.5mm ±10% |
| Stiffness: |
0.4 N/micron ±10% |
| Unloaded resonant frequency: |
165 Hz (as shown) ±5% |
| Dimensions: |
105 x 120 x 25 mm |
| Through Hole Dia: |
28mm |
| Load capability: |
60 N |
| Material: |
Aluminum/Stainless |
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