Piezo Stages
DSM offers both standard products and custom OEM design services. Consider hiring DSM to design and manufacture a custom flexure based piezo stage for your existing or new products. Or, buy one of our standard products shown below.
- Flexure-based, solid-state piezo actuators optimized by FEA
- Designs for constrained geometries and restrictive environments (non-magnetic, vacuum, high-temperature, shock-resistant)
DSM Model XSA-0200C
DSM’s nanopositioning piezoelectric XSA-0200C stage features flexure-guided motion over a 200 micron travel range for scanning, metrology, and inspection processes. The stage’s stable and stiff kinematic design promotes parallelism in the output motion with minimal pitch and yaw as well as dynamic responsiveness for excellent position stability and control.
Download the Product Data Sheet
Specifications
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Open-Loop Travel |
200 micron ± 10% |
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Stiffness |
0.8N/micron ± 10% |
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Linearity |
0.12% typical |
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Pitch / Yaw: |
<20 micro radians typical |
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Unloaded Resonant Freq |
420 Hz ± 10% |
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Blocking Force |
160 N ± 10% |
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Push/pull force capacity |
40 N Max |
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Electrical Capacitance |
3.6 micro Farads ± 10% |
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Operating Temp Range |
-20 to 80 degrees Celsius |
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Operating Voltage |
-30 to 150 V |
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Dimensions |
60 x 60 x 12.5 mm |
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Mass |
Stainless steel |
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