Model XSA-0200C

Nanopositioner commonly used for scanning, metrology, and inspection processes.

DSM’s nanopositioning piezoelectric XSA-0200C stage features flexure-guided motion over a 200  micron travel range for scanning, metrology, and inspection processes.  The stage’s stable and stiff kinematic design promotes parallelism in the output motion with minimal pitch and yaw as well as dynamic responsiveness for excellent position stability and control.  

Model ZSA-1000C

Nanopositioning actuators feature custom ranges of motion based on the customer's needs.

DSM’s nanopositioning piezoelectric ZSA-1000C stage features flexure-guided motion over a 1000  micron travel range for scanning, metrology, and inspection processes.  The stage’s stable and stiff kinematic design promotes parallelism in the output motion with extremely low pitch and yaw as well as dynamic responsiveness for excellent position stability and control.  

 

 PRODUCT INFORMATION

Stage Part NumberStroke
(µm)
Stiffness
(N/µm)
Unloaded Resonant
Frequency
(Hz)
Block Force
(N)
VoltageNominal
Capacitance
(µF)
(Click Part# to view/download Datasheet)  
XSA-0200C 200 0.8 420 160 -30 to +150 3.6
ZSA-1000C 1000 0.4 200 150 -30 to +150 30

NOTES: 

  • Most models have or can be customized to include feedback devices for closed loop operation.
  • Available Options: Non-magnetic, Vacuum, High-Temperature, Shock-Resistant
  • Custom XSA X-Stages available up to 800 microns
  • Custom ZSA Z-Stages available from 100-1000 microns
  • Flexure-based, solid-state piezo actuators optimized by FEA