Example of high frequency Piezo shutter assembly

The XRS1-800 and XRS1-1600 are two versions of a shutter assembly that can be used to rapidly change between open and closed condition, making them suitable for controlling exposure of samples to FELs and other beamlines.  Each shutter is made using two opposed piezoelectric actuators with teeth that block the beam in the default condition and open to permit the beam to pass through when energized.  Shutters are ultra-high vacuum compatible and options such as tungsten teeth can be incorporated.  For dynamic applications, a K-type thermocouple is typically incorporated so that temperature can be monitored to prevent overheating.  Please contact DSM for other options or questions. 


XRS1-800 XRS1-1600
Nominal Open-loop Travel per Actuator (µm)
-30 to +150 Volt excitation: 450 800
0 to +160 Volt excitation: 370 630
Shutter Opening at -30 to +150V (µm): ±10% * 905 1675
Shutter Opening at 0 to +160V (µm): ±10% * 745 1295
Typical Operating Voltage (V): 0 to +160 0 to +160
First Translational Natural Frequency (Hz) : 500 300
Minimum Recommended Rise/Fall Time (ms) : 3.4 5.7
Capacitance (µF): 3.4 3.4
Material: Stainless Steel Stainless Steel
Mass (g): 230 230
Outline Dimensions (mm): 52.5 x 44 x 22.25 52.5 x 44 x 22.25

* Shutter Opening specifications includes a 75µm  overlap at zero volts.

Highlights of the Shutter Design

  • Flexure-guided for smooth, parallel motion
  • UHV Compatible
  • High natural frequencies and rapid response
  • Customizable and scalable for new applications


  • Shutter / Beam Stop
  • Optical Setups
  • Free Electron Laser (FEL) Beam Stop