Piezoelectric Actuators and Stages for
Micropositioning and Nanopositioning Applications

DSM's customers have used our piezo actuators and piezo stages to perform optical scanning, optical switching, semiconductor wafer handling and wafer inspection, servo valve control, material research (nanoindentation, tensile characterization, thin film stress testing), interferometry, microscopy, drive shaft balancing, vibration mitigation and testing, sensor calibration, telescope mirror correction, material removal processes (fast tool servo), cutting processes, biological imaging within a MRI scanner, and so on!

What "mission critical motion control" requirement can we help you with?

We invite you to become more familiar with piezoelectric actuator technology by reading DSM's application notes regarding piezoelectric actuation mechanisms:

• An Introduction
• Design Challenges With Piezo-Actuators
• Piezo-Actuators driving Spring Loads
• Flextensional Piezo-Actuator Operation
• More to come...

NOTE: In the FPA product name, "E" indicates "Expand" on energize, and "C" indicates "Contract" on energize.

	NA-25 and NA-80 The NA-25 and NA-80 direct drive actuators are preloaded piezoelectric actuators designed to withstand high tensile loads in operation. Nominal Displacement Range: 25 and 80 µm More Data >>
	FPA-80E The FPA-80E is a miniature, flexure-guided piezoelectric actuator designed for weight- and space-sensitive applications including microvalves. Nominal Displacement Range: 80 µm More Data >>
	FPA-100E The FPA-100E is a compact, solid-state, piezoelectric actuator useful in small spaces and material characterization applications. Nominal Displacement Range: 100 µm More Data >>
	LPA-100 A leveraged piezo actuator ideal for both dynamic and static applications. Nominal Displacement Range: 110 µm More Data >>
	FPA-180E The titanium FPA-180E is a miniature, flexure-guided piezoelectric actuator designed for weight- and space-sensitive applications including microvalves. Nominal Displacement Range: 180 µm More Data >>
Do you want DSM to consider your specific piezo system requirements? Click here for a list of application FAQs.
	FPA-200C-HK The FPA-200C-HK is a flexure-based piezoelectric actuator ideal for both dynamic and static applications where precise and accurate positioning is required. More Data >>
	FPA-500E The FPA-500E piezoelectric actuator features parallel linkages to ensure a stable output motion. Nominal Displacement Range: 500 µm More Data >>
	FPA-550C The FPA-550C piezo actuator was designed to achieve relatively high natural frequency and stiffness characteristics. Nominal Displacement Range: 550 µm More Data >>
	FPA-550E-HK The FPA-550E-HK is a flexure-based piezoelectric actuator ideal for both dynamic and static applications where precise and accurate positioning is required. More Data >>
	FPA-900E The FPA-900E piezoelectric actuator and its sister, the FPA-550C, were both designed for R&D tooling used in material development and characterization. Nominal Displacement Range: 900 µm More Data >>
Do you want DSM to consider your specific piezo system requirements? Click here for a list of application FAQs.
	FPA-1450C The FPA-1450C is a large stroke, high-force piezoelectric actuator designed for "pulling" applications and featuring parallel linkages to ensure a stable output motion. Nominal Displacement Range: 1450 µm More Data >>
	FPA-2000E The FPA-2000E piezoelectric actuator was designed for high-stroke, accurate positioning applications and features parallel linkages to ensure a stable output. Nominal Displacement Range: 2000 µm More Data >>
	LFPA-6000, LFPA-10000 The LFPA actuators achieve large displacement ranges through two stages of amplification. They are designed with non-magnetic materials for use in magnetic resonance imaging (MRI) applications. Nominal Displacement Range: 6 and 10 mm More Data >>
	ZSA-1000 Large Stroke Stage DSM's ZSA-1000 stage is a stiff, large-stroke piezoelectric actuator ideal for microscopy and wafer metrology applications. A 28 mm diameter through-hole provides access for optics or tooling. Nominal Displacement Range: 1000 µm More Data >>
Do you want DSM to consider your specific piezo system requirements? Click here for a list of application FAQs.