3-Axis piezo stage actuator

DSM has experience building 3-axis piezo stages that meet stringent specifications.

Example of custom design work for the US Army.

To the right is an example of a 3-axis piezo stage designed and built by DSM for a custom application.  DSM is willing to work with you to come up with a piezo stage solution.   

Contact us today to discuss a custom piezo stage design - development@dynamic-structures.com

Below are DSM's standard parallel kinematic stages.


PKA-ZPR-200     

Z-Translation Stage with Two-Axis Rotation

  • Flexure-guided for smooth, parallel motion
  • Option for integrated metrology
  • High natural frequencies and rapid response
  • Linear displacement range of 200 µm
  • Angular displacement > 4 milliradians
  • Customizable and scalable for new applications

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PKA-XYZ-400      

XYZ Translation Stage

  • Flexure guided stages for smooth, parallel motion
  • Minimal and repeatable angular runout
  • Option for integrated metrology
  • High natural frequencies and rapid response
  • Displacement range of 400 µm
  • Customizable and scalable for new applications
  • Low Runout
  • Clear Center Aperture

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This parallel kinematic stage features translation in the X, Y, and Z axis.

This parallel kinematic stage features translation in the X, Y, and Z axis.